Public Title DDFILM - Version 2 (Integrated into DDSURF) Division Lead Inventor Zhang, Haiping Public Description This technology is a software package that models the internal fields of a feature (defect) embedded within an infinite thin film. The system is suited for use in the design of semiconductor wafer fabrication equipment and semiconductor wafer inspection where thin layers of semiconductor materials are deposited onto a silicon substrate. This software is an add-on module to DDSURF, which was created at Arizona State University. Patent Status Public References Key Words Manager Hilton Turner Email haturner@prf.org Telephone 765-588-3479 Fax 765-463-3486   Back to List