Public Title DDSUB - Version 1 Division Lead Inventor Nebeker, Brent Public Description This technology is a software package for modeling the internal fields within a feature (defect) embedded below the surface of an infinite half-plane substrate (semiconductor wafer. DDSUB also includes FFSUB, which is an associated model for computing the far-field propagation of light scattered by the feature. The software can be utilized for the design of semiconductor wafer fabrication equipment and semiconductor wafer inspection. This software is also an add-on module to DDSURF, which was created at Arizona State University. Patent Status Public References Key Words Manager Hilton Turner Email haturner@prf.org Telephone 765-588-3479 Fax 765-463-3486   Back to List