Public Title DDEFILM - Version 1 Division Lead Inventor Zhang, Haiping Public Description DDEFILM models light scattering from non-homogeneous, non-spherical features embedded in stratification layers. This technology would be useful for semiconductor wafer inspection as well as for detection of various subsurface objects. Patent Status Public References Key Words Manager Hilton Turner Email haturner@prf.org Telephone 765-588-3479 Fax 765-463-3486   Back to List