Public Title Low-cost Process-independent RF MEMS Switch Division Lead Inventor Public Description Radio Frequency (RF) Micro-Electro-Mechanical Systems (MEMS) switches have been designed, developed and commercialized, but have not found wide-spread acceptance because of their very high cost. This large cost is due to high process variability, resulting in low manufacturing yield. Purdue researchers have developed a novel design for a process-independent MEMS switch. This switch can be produced with very high yield and low cost while maintaining its critical properties including actuation voltage, contact resistance and residual stress. Patent Status Public References Key Words MEMS, Process Variability, Switch, High Yield, Silicon-on-Insulator Manager Hilton Turner Email haturner@prf.org Telephone 765-588-3479 Fax 765-463-3486   Back to List